ECD Fluoride Monitoring System

Accurate Fluoride Monitoring System for Semiconductor Fabrication Wastewater Treatment

Process engineers and plant technicians in need of a Fluoride measurement solution will find the new Fluoride Monitoring System from Electro-Chemical Devices (ECD) provides a highly accurate turn-key analyzer solution for semiconductor fabrication washing and wastewater treatment processes.

The Fluoride Monitoring System from ECD is designed with its advanced System C22 Smart Controller and precision S10 and S17 Fluoride pIon Sensors. The C22 Controller features a Multi-Bus design, which enables customization of up to four inputs and six outputs in a convenient 1/2 DIN NEMA 4X enclosure. Channel comparisons or measurement compensation, configurable conductivity concentration curves, the graphical display of data and PID control on the outputs or up to eight optional SPDT relays are just a few of the powerful features in this easy to use instrument.

The C22 Controller provides multi-channel comparison of measurements or inputs, which can improve the accuracy of Fluoride measurement. For example, Fluoride ions are affected by changes in the pH of a solution. The correct measurement of Fluoride levels is only possible if pH is also calculated and appropriate compensation algorithms are processed. The flexible and powerful C22 easily handles these types of measurement comparisons.

The efficient use of Fluoride is an important part of the semiconductor industry’s fabrication process. Effective etching of semiconductor wafers is dependent on Fluoride usage. Such processes produce wastewater and effluent contaminated with Fluoride, which must be accurately analyzed for effective treatment. ECD’s S10 and S17 Fluoride pIon sensors combined with the C22 Controller are well suited for this task.

ECD’s S10 and S17’s specific (pIon) electrode cartridge measures the activity of “free” Fluoride ions in solution in concentrations from 0.02 to 2,000 ppm over a pH range from 5-8 pH. They operate over a wide temperature range of 0 to 80º C. The S10 Immersion or Insertion Sensor is designed with a 0.75-inch MNPT compression fitting as the process connection and allows a variable insertion length to accommodate installation in pipe tees, flow cells or through tank walls. The S17 Retractable Sensor is designed with a 1-inch MNPT ball valve, a 1-x-0.75 inch reducer and a 0.75 inch MNPT compression fitting to provide the process connection.

In addition to Fluoride measurement, ECD’s replaceable electrode cartridges for the S10 and S17 Sensors can also be selected to measure parameters including other specific ions, pH, ORP, dissolved oxygen, conductivity and resistivity. These cartridges provide specific industrial process measurement solutions, and they are constructed in a variety of configurations and materials to support diverse industries.

Links of Interest
S80 Fluoride Sensor